Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bhadri N. Varadarajan0
Yongsik Yu0
Bart J. van Schravendijk0
Nagraj Shankar0
Date of Patent
March 3, 2020
0Patent Application Number
159725540
Date Filed
May 7, 2018
0Patent Citations
Patent Citations Received
Patent Primary Examiner
0
Patent abstract
Methods and apparatuses for depositing an encapsulation layer over a staircase structure during fabrication of a 3D NAND structure to prevent degradation of an oxide-oxide interface and to prevent punchthrough of a wordline are provided. The encapsulation layer is a carbon-containing conformal film deposited over a staircase structure of alternating oxide and nitride layers prior to depositing oxide over the staircase structure.
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