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US Patent 10367076 Air gap spacer with controlled air gap height
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Patent
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Date Filed
January 31, 2018
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Date of Patent
July 30, 2019
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Patent Application Number
15884934
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Patent Citations Received
US Patent 10872965 Method of forming semiconductor structure
US Patent 11929419 Semiconductor device
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Patent Inventor Names
Kangguo Cheng
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Xin Miao
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Chen Zhang
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Wenyu Xu
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10367076
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Patent Primary Examiner
Theresa T Doan
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