US Patent 10381273 Vertically stacked multi-channel transistor structure

A substrate structure for a vertically stacked transistor includes a substrate having at least one fin and a cavity formed through a portion of the substrate. An inner spacer disposed in the cavity. A first epitaxy layer disposed upon the substrate, and a liner is disposed on portions of the first epitaxy layer and the inner spacer. A second epitaxy layer is disposed upon a top portion of the liner. The first epitaxy layer and the second epitaxy layer share a common U-shaped fin body formed by the inner spacer and the at least one fin.