US Patent 10459353 Lithography system with an embedded cleaning module
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Patent abstract
The present disclosure provides a lithography system. The lithography system includes an exposing module configured to perform a lithography exposing process using a mask secured on a mask stage; and a cleaning module integrated in the exposing module and designed to clean at least one of the mask and the mask stage using an attraction mechanism.
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Patent Jurisdiction
Patent Number
104593530
Date of Patent
October 29, 2019
0Patent Application Number
141681140
Date Filed
January 30, 2014
0Patent Citations Received
Patent Primary Examiner
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Patent Jurisdiction
Patent Number
104593530
Date of Patent
October 29, 2019
0Patent Application Number
141681140
Date Filed
January 30, 2014
0Patent Citations Received
Patent Primary Examiner
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US Patent 10459353 Lithography system with an embedded cleaning module
Infobox
Is a
Patent jurisdiction
Patent number
10459353
Date of patent
October 29, 2019
Patent application number
14168114
Date Filed
January 30, 2014
Patent primary examiner
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