Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 31, 2019
Patent Application Number
15891633
Date Filed
February 8, 2018
Patent Citations Received
Patent Primary Examiner
Patent abstract
A resist composition comprising a base polymer and a quencher in the form of an iodonium salt of fluorinated aminobenzoic acid, fluorinated nitrobenzoic acid or fluorinated hydroxybenzoic acid offers a high dissolution contrast and minimal LWR independent of whether it is of positive or negative tone.
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