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US Patent 10534115 Gray-tone electron-beam lithography

Patent 10534115 was granted and assigned to Facebook on January, 2020 by the United States Patent and Trademark Office.

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Patent attributes

Patent Applicant

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Current Assignee

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Giuseppe Calafiore0

Matthew E Colburn0

Date of Patent

January 14, 2020

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Patent Application Number

157134190

Date Filed

September 22, 2017

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Patent Citations Received

US Patent 11972508 Image sensor comprising a color splitter with two different refractive indexes, and different height

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US Patent 11609418 Optical eyepiece using single-sided patterning of grating couplers

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US Patent 11664194 Procedural electron beam lithography

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US Patent 11709422 Gray-tone lithography for precise control of grating etch depth

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US Patent 11372149 Depth-modulated slanted gratings using gray-tone lithography and slant etch

US Patent 11388390 Wearable electronic device on head

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US Patent 11573356 Diffraction grating comprising double-materials structures

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US Patent 11022790 Optical eyepiece using single-sided patterning of grating couplers

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Patent Primary Examiner

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Patent abstract

A modulated beam moving stage device is used in electron-beam photolithography to create an optical device. The optical device can have varying pitch to increase angular selectivity to increase light entering an eyebox of a virtual-reality and/or an augmented-reality system.

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