US Patent 10534115 Gray-tone electron-beam lithography
Patent 10534115 was granted and assigned to Facebook on January, 2020 by the United States Patent and Trademark Office.
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Patent abstract
A modulated beam moving stage device is used in electron-beam photolithography to create an optical device. The optical device can have varying pitch to increase angular selectivity to increase light entering an eyebox of a virtual-reality and/or an augmented-reality system.
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Patent Inventor Names
Giuseppe Calafiore0
Matthew E Colburn0
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Patent Number
105341150
Date of Patent
January 14, 2020
0Patent Application Number
157134190
Date Filed
September 22, 2017
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Patent Primary Examiner
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US Patent 10534115 Gray-tone electron-beam lithography
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10534115
Date of patent
January 14, 2020
Patent application number
15713419
Date Filed
September 22, 2017
Patent primary examiner
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