Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 28, 2022
Patent Application Number
16662086
Date Filed
October 24, 2019
Patent Citations
Patent Citations Received
Patent Primary Examiner
An apparatus with a grating structure and a method for forming the same are disclosed. The grating structure includes forming a wedge-shaped structure in a grating layer using a grayscale resist and photo lithography. A plurality of channels is formed in the grating layer to define slanted grating structures therein. The wedge-shaped structure and the slanted grating structures are formed using a selective etch process.
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