US Patent 11372149 Depth-modulated slanted gratings using gray-tone lithography and slant etch
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Patent Number
113721490
Date of Patent
June 28, 2022
0Patent Application Number
166620860
Date Filed
October 24, 2019
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Patent Number
113721490
Date of Patent
June 28, 2022
0Patent Application Number
166620860
Date Filed
October 24, 2019
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US Patent 11372149 Depth-modulated slanted gratings using gray-tone lithography and slant etch
Article
An apparatus with a grating structure and a method for forming the same are disclosed. The grating structure includes forming a wedge-shaped structure in a grating layer using a grayscale resist and photo lithography. A plurality of channels is formed in the grating layer to define slanted grating structures therein. The wedge-shaped structure and the slanted grating structures are formed using a selective etch process.
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Patent applicant
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Patent jurisdiction
Patent number
11372149
Date of patent
June 28, 2022
Patent application number
16662086
Date Filed
October 24, 2019
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