US Patent 10648788 Substrate distance monitoring

Patent

Applied Materials

Applied Materials

US Patent 10481122 Gas sensor element and gas sensor

US Patent 10514356 Gas sensor

US Patent 10508338 Device for atomic layer deposition

US Patent 10184786 Wear amount measuring apparatus and method, temperature measuring apparatus and method and substrate processing system

US Patent 10196741 Wafer placement and gap control optimization through in situ feedback

US Patent 10312120 Position and temperature monitoring of ALD platen susceptor

US Patent 10403476 Active showerhead

US Patent 10460916 Real time monitoring with closed loop chucking force control

US Patent 11296189 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures

US Patent 11289326 Method for reforming amorphous carbon polymer film

US Patent D947913 Susceptor shaft

US Patent 11295980 Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures

US Patent 11242598 Structures including metal carbide material, devices including the structures, and methods of forming same

US Patent 11244825 Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process

US Patent 11001925 Substrate processing apparatus

US Patent 11004977 Method for depositing a group IV semiconductor and related semiconductor device structures

US Patent 11015245 Gas-phase reactor and system having exhaust plenum and components thereof

US Patent 11018002 Method for selectively depositing a Group IV semiconductor and related semiconductor device structures

United States Patent and Trademark Office

Rudy Zervigon