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US Patent 10676812 Evaporation source
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Edits on 24 May, 2023
"Remove website redirecting to Patent Public Search front page"
Golden AI
edited on 24 May, 2023
Edits made to:
Infobox
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-1
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Infobox
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=10676812
0
Edits on 2 Apr, 2023
"update citations for inverse infoboxes"
Golden AI
edited on 2 Apr, 2023
Infobox
Patent Citations
US Patent 10147597 Turbulent flow spiral multi-zone precursor vaporizer
0
Edits on 31 Mar, 2023
"update citations for inverse infoboxes"
Golden AI
edited on 31 Mar, 2023
Infobox
Patent Citations
US Patent 10385452 Source reagent-based delivery of fluid with high material flux for batch deposition
0
Edits on 25 Mar, 2023
"update citations for inverse infoboxes"
Golden AI
edited on 25 Mar, 2023
Infobox
Patent Citations
US Patent 10392700 Solid vaporizer
0
Edits on 27 Sep, 2022
"update citations for inverse infoboxes"
Golden AI
edited on 27 Sep, 2022
Infobox
Patent Citations
US Patent 10147597 Turbulent flow spiral multi-zone precursor vaporizer
0
Edits on 24 Sep, 2022
"update citations for inverse infoboxes"
Golden AI
edited on 24 Sep, 2022
Infobox
Patent Citations
US Patent 10294584 SiC single crystal sublimation growth method and apparatus
0
Edits on 23 Sep, 2022
"Entity importer update"
Golden AI
edited on 23 Sep, 2022
Infobox
Is a
Patent
0
Patent Applicant
Flisom
0
Current Assignee
Flisom
0
Patent Jurisdiction
United States Patent and Trademark Office
0
Patent Number
10676812
0
Date of Patent
June 9, 2020
0
Patent Application Number
15753474
0
Date Filed
August 17, 2016
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=10676812
0
Patent Citations
US Patent 10147597 Turbulent flow spiral multi-zone precursor vaporizer
0
US Patent 10294584 SiC single crystal sublimation growth method and apparatus
0
US Patent 10385452 Source reagent-based delivery of fluid with high material flux for batch deposition
0
US Patent 10392700 Solid vaporizer
0
US Patent 10465282 Systems for modifying pressure differential in a chemical vapor process
0
Patent Primary Examiner
Rudy Zervigon
0
"update citations for inverse infoboxes"
Golden AI
edited on 22 Sep, 2022
Infobox
Patent Citations
US Patent 10385452 Source reagent-based delivery of fluid with high material flux for batch deposition
0
Edits on 8 Jun, 2022
"Entity importer update"
Golden AI
edited on 8 Jun, 2022
Edits made to:
Infobox
(
+1
properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10676812
Edits on 4 Feb, 2022
"Created via: Entity Importer"
Golden AI
created this topic on 4 Feb, 2022
Edits made to:
Infobox
(
+14
properties)
US Patent 10676812 Evaporation source
Infobox
Is a
Patent
Patent applicant
Flisom
Current assignee
Flisom
Patent jurisdiction
United States Patent and Trademark Office
Patent number
10676812
Date of patent
June 9, 2020
Patent application number
15753474
Date Filed
August 17, 2016
Patent citations
US Patent 10147597 Turbulent flow spiral multi-zone precursor vaporizer
US Patent 10294584 SiC single crystal sublimation growth method and apparatus
US Patent 10385452 Source reagent-based delivery of fluid with high material flux for batch deposition
US Patent 10392700 Solid vaporizer
US Patent 10465282 Systems for modifying pressure differential in a chemical vapor process
Patent primary examiner
Rudy Zervigon
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