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US Patent 10676812 Evaporation source
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Patent
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Current Assignee
Flisom
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Date Filed
August 17, 2016
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Date of Patent
June 9, 2020
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Patent Applicant
Flisom
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Patent Application Number
15753474
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Patent Citations
US Patent 10392700 Solid vaporizer
US Patent 10147597 Turbulent flow spiral multi-zone precursor vaporizer
US Patent 10294584 SiC single crystal sublimation growth method and apparatus
US Patent 10385452 Source reagent-based delivery of fluid with high material flux for batch deposition
US Patent 10465282 Systems for modifying pressure differential in a chemical vapor process
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10676812
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Patent Primary Examiner
Rudy Zervigon
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