US Patent 10679848 Selective atomic layer deposition with post-dose treatment
Patent 10679848 was granted and assigned to Lam Research on June, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 12, 2018
Date of Patent
June 9, 2020
Patent Applicant
Patent Application Number
16034022
Patent Citations
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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