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US Patent 10734196 Impedance matching device

Overview Structured Data Issues Contributors Activity

Is a

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Date of Patent

August 4, 2020

Patent Application Number

16333381

Date Filed

September 25, 2017

Patent Citations

US Patent 10340879 Switching circuit

US Patent 10431424 Parasitic capacitance compensation circuit

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US Patent 10431428 System for providing variable capacitance

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US Patent 10454453 RF impedance matching network

US Patent 10460912 RF impedance matching circuit and systems and methods incorporating same

US Patent 10455729 Enclosure cooling system

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US Patent 10483090 Restricted capacitor switching

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US Patent 10026594 RF impedance matching network

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Patent Citations Received

US Patent 11978612 Plasma processing apparatus

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US Patent 11948775 Combined RF generator and RF solid-state matching network

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Patent Primary Examiner

Stephen E. Jones

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