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US Patent 10734196 Impedance matching device

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Patent Citations Received
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US Patent 11978612 Plasma processing apparatus
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Patent Citations Received
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US Patent 11948775 Combined RF generator and RF solid-state matching network
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=10734196
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https://pdfpiw.uspto.gov/.piw?Docid=10734196
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 US Patent 10734196 Impedance matching device

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10734196
Date of patent
August 4, 2020
Patent application number
16333381
Date Filed
September 25, 2017
Patent citations
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US Patent 10026594 RF impedance matching network
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US Patent 10217608 Switching circuit for RF currents
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US Patent 10340879 Switching circuit
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US Patent 10454453 RF impedance matching network
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US Patent 10455729 Enclosure cooling system
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US Patent 10431424 Parasitic capacitance compensation circuit
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US Patent 10431428 System for providing variable capacitance
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US Patent 10460912 RF impedance matching circuit and systems and methods incorporating same
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US Patent 10483090 Restricted capacitor switching
Patent primary examiner
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Stephen E. Jones

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