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US Patent 10741458 Methods for depositing films on sensitive substrates

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Edits on 22 Jul, 2023
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Golden AI
edited on 22 Jul, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=1074145800
Edits on 10 May, 2023
"update inverses"
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edited on 10 May, 2023
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Patent Citations Received
‌
US Patent 11646198 Ultrathin atomic layer deposition film accuracy thickness control
0
Edits on 25 Apr, 2023
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Golden AI
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Edits on 31 Mar, 2023
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Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
107414580
Date of Patent
August 11, 2020
0
Patent Application Number
159656280
Date Filed
April 27, 2018
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=107414580
Patent Citations
‌
US Patent 10008428 Methods for depositing films on sensitive substrates
0
‌
US Patent 10037884 Selective atomic layer deposition for gapfill using sacrificial underlayer
0
‌
US Patent 10043655 Plasma activated conformal dielectric film deposition
0
‌
US Patent 10043657 Plasma assisted atomic layer deposition metal oxide for patterning applications
0
‌
US Patent 10062563 Selective atomic layer deposition with post-dose treatment
0
‌
US Patent 10269559 Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
0
‌
US Patent 10373806 Apparatus and method for deposition and etch in gap fill
0
‌
US Patent 10361076 Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
0
‌
US Patent 10559468 Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
0
Patent Citations Received
‌
US Patent 11011379 Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
0
Patent Primary Examiner
‌
Thanhha S. Pham
0
Edits on 28 Mar, 2023
"update citations for inverse infoboxes"
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Golden AI
edited on 28 Mar, 2023
Edits on 27 Mar, 2023
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edited on 27 Mar, 2023
Edits on 24 Mar, 2023
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edited on 24 Mar, 2023
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Edits on 23 Mar, 2023
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edited on 23 Mar, 2023
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Edits on 28 Sep, 2022
"update citations for inverse infoboxes"
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edited on 28 Sep, 2022
Edits on 26 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 26 Sep, 2022
"Entity importer update"
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edited on 25 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
107414580
Date of Patent
August 11, 2020
0
Patent Application Number
159656280
Date Filed
April 27, 2018
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=107414580
Patent Citations
‌
US Patent 10008428 Methods for depositing films on sensitive substrates
0
‌
US Patent 10037884 Selective atomic layer deposition for gapfill using sacrificial underlayer
0
‌
US Patent 10043655 Plasma activated conformal dielectric film deposition
0
‌
US Patent 10043657 Plasma assisted atomic layer deposition metal oxide for patterning applications
0
‌
US Patent 10062563 Selective atomic layer deposition with post-dose treatment
0
‌
US Patent 10269559 Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
0
‌
US Patent 10373806 Apparatus and method for deposition and etch in gap fill
0
‌
US Patent 10361076 Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
0
‌
US Patent 10559468 Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
0
Patent Citations Received
‌
US Patent 11011379 Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
0
Patent Primary Examiner
‌
Thanhha S. Pham
0
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 25 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 25 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 25 Sep, 2022
Edits on 25 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 25 Sep, 2022
Edits on 8 Jun, 2022
"Entity importer update"
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Golden AI
edited on 8 Jun, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10741458

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