US Patent 10886140 3D NAND etch
Patent 10886140 was granted and assigned to Applied Materials on January, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 26, 2019
0
Date of Patent
January 5, 2021
0
Patent Applicant
Patent Application Number
16523262
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Patent Citations
Patent Inventor Names
Tomohiko Kitajima
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Abhijit Basu Mallick
0
Bo Qi
0
Harry S. Whitesell
0
Huiyuan Wang
0
Pramit Manna
0
Rui Cheng
0
Shishi Jiang
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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