Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
January 12, 2021
Patent Application Number
16346873
Date Filed
December 23, 2016
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.
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