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US Patent 10892223 Advanced lithography and self-assembled devices

Patent 10892223 was granted and assigned to Intel on January, 2021 by the United States Patent and Trademark Office.

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edited on 12 Dec, 2023
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Patent abstract

Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.

Edits on 24 May, 2023
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edited on 24 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=1089222300
Edits on 7 Apr, 2023
"Entity importer update"
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edited on 7 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Applicant
Intel
Intel
0
Current Assignee
Intel
Intel
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
108922230
Date of Patent
January 12, 2021
0
Patent Application Number
163468730
Date Filed
December 23, 2016
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=108922230
Patent Citations
‌
US Patent 10014256 Unidirectional metal on layer with ebeam
0
‌
US Patent 10153270 Electrostatic discharge protection devices
0
‌
US Patent 10211088 Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects
0
‌
US Patent 10269623 Image tone-reversal with a dielectric using bottom-up cross-linking for back end of line (BEOL) interconnects
0
Patent Citations Received
‌
US Patent 11398415 Stacked through-silicon vias for multi-device packages
0
Patent Primary Examiner
‌
Karen Kusumakar
0
Edits on 7 Apr, 2023
"update citations for inverse infoboxes"
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Golden AI
edited on 7 Apr, 2023
Edits on 1 Apr, 2023
"update citations for inverse infoboxes"
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edited on 1 Apr, 2023
Edits on 28 Sep, 2022
"update citations for inverse infoboxes"
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edited on 28 Sep, 2022
Edits on 28 Sep, 2022
"update citations for inverse infoboxes"
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edited on 28 Sep, 2022
Edits on 26 Sep, 2022
"update citations for inverse infoboxes"
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edited on 26 Sep, 2022
Edits on 23 Sep, 2022
"Entity importer update"
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Golden AI
edited on 23 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Applicant
Intel
Intel
0
Current Assignee
Intel
Intel
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
108922230
Date of Patent
January 12, 2021
0
Patent Application Number
163468730
Date Filed
December 23, 2016
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=108922230
Patent Citations
‌
US Patent 10014256 Unidirectional metal on layer with ebeam
0
‌
US Patent 10153270 Electrostatic discharge protection devices
0
‌
US Patent 10211088 Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects
0
‌
US Patent 10269623 Image tone-reversal with a dielectric using bottom-up cross-linking for back end of line (BEOL) interconnects
0
Patent Citations Received
‌
US Patent 11398415 Stacked through-silicon vias for multi-device packages
0
Patent Primary Examiner
‌
Karen Kusumakar
0
Edits on 27 Jul, 2022
"update inverses"
Golden AI profile picture
Golden AI
edited on 27 Jul, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 11398415 Stacked through-silicon vias for multi-device packages
Edits on 17 Jun, 2022
"Entity importer update"
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Golden AI
edited on 17 Jun, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10892223
Edits on 9 Feb, 2022
"Created via: Entity Importer"
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created this topic on 9 Feb, 2022
Edits made to:
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 US Patent 10892223 Advanced lithography and self-assembled devices

Infobox
Is a
Patent
Patent
Patent applicant
Intel
Intel
Current assignee
Intel
Intel
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10892223
Date of patent
January 12, 2021
Patent application number
16346873
Date Filed
December 23, 2016
Patent citations
‌
US Patent 10014256 Unidirectional metal on layer with ebeam
‌
US Patent 10153270 Electrostatic discharge protection devices
‌
US Patent 10211088 Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects
‌
US Patent 10269623 Image tone-reversal with a dielectric using bottom-up cross-linking for back end of line (BEOL) interconnects
Patent primary examiner
‌
Karen Kusumakar

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