Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 12, 2021
Patent Application Number
16169269
Date Filed
October 24, 2018
Patent Citations
...
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to a scaled gate contact and source/drain cap and methods of manufacture. The structure includes: a gate structure comprising an active region; source and drain contacts adjacent to the gate structure; a capping material over the source and drain contacts; a gate contact formed directly above the active region of the gate structure and over the capping material; a U-shape dielectric material around the gate contact, above the source and drain contacts; and a contact in direct electrical contact to the source and drain contacts.
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