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US Patent 11031485 Transistor with airgap spacer
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Is a
Patent
Date Filed
June 4, 2019
Date of Patent
June 8, 2021
Patent Application Number
16430504
Patent Citations
US Patent 10026824 Air-gap gate sidewall spacer and method
US Patent 10177237 Etch stop for airgap protection
Patent Citations Received
US Patent 11876114 Airgap gate spacer
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11031485
Patent Primary Examiner
Christine A Enad
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