Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Viljami J. Pore0
Marko Tuominen0
Raija H. Matero0
Suvi P. Haukka0
Antti Niskanen0
Eva Tois0
Hannu Huotari0
Date of Patent
June 29, 2021
0Patent Application Number
165943650
Date Filed
October 7, 2019
0Patent Citations
...
Patent Primary Examiner
Patent abstract
Methods are provided for dual selective deposition of a first material on a first surface of a substrate and a second material on a second, different surface of the same substrate. The selectively deposited materials may be, for example, metal, metal oxide, or dielectric materials.
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