Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jun Hatakeyama0
Daisuke Domon0
Date of Patent
June 29, 2021
0Patent Application Number
161425520
Date Filed
September 26, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A resist composition comprising a base polymer and a sulfonium salt of brominated indole or brominated indazole carboxylic acid offers a high sensitivity, minimal LWR and improved CDU independent of whether it is of positive or negative tone.
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