US Patent 11075058 Spatially variable wafer bias power system
Patent 11075058 was granted and assigned to Eagle Harbor Technologies, Inc. on July, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 19, 2019
Date of Patent
July 27, 2021
Patent Applicant
Patent Application Number
16721396
Patent Citations
Patent Citations Received
•••
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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