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US Patent 11086233 Protective coating for electrostatic chucks

Patent 11086233 was granted and assigned to Lam Research on August, 2021 by the United States Patent and Trademark Office.

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Patent Applicant

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Current Assignee

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Vincent Burkhart1

Stephen Topping1

Date of Patent

August 10, 2021

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Patent Application Number

201803201

Date Filed

March 20, 2018

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Patent Citations Received

US Patent 12074052 Forming mesas on an electrostatic chuck

2

US Patent 11835868 Protective coating for electrostatic chucks

3

US Patent 11990360 Electrostatic chuck (ESC) pedestal voltage isolation

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Patent abstract

An ElectroStatic Chuck (ESC) including a chucking surface having at least a portion covered with a coating of silicon oxide (SiO2), silicon nitride (Si3N4) or a combination of both. The coating can be applied in situ a processing chamber of a substrate processing tool and periodically removed and re-applied in situ to create fresh coating.

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