US Patent 11835868 Protective coating for electrostatic chucks

Is a

Patent

Patent attributes

Patent Applicant

Lam Research

Current Assignee

Lam Research

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

118358680

Patent Inventor Names

Vincent Burkhart0

Stephen Topping0

Date of Patent

December 5, 2023

Patent Application Number

173696940

Date Filed

July 7, 2021

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Patent Primary Examiner

CPC Code

...

Patent abstract

An ElectroStatic Chuck (ESC) including a chucking surface having at least a portion covered with a coating of silicon oxide (SiO

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US Patent 11835868 Protective coating for electrostatic chucks

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