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US Patent 11835868 Protective coating for electrostatic chucks

Patent 11835868 was granted and assigned to Lam Research on December, 2023 by the United States Patent and Trademark Office.

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US Patent 11835868 Protective coating for electrostatic chucks

Article

Patent abstract

An ElectroStatic Chuck (ESC) including a chucking surface having at least a portion covered with a coating of silicon oxide (SiO

Infobox

Is a

Patent

Patent Applicant

Lam Research

Current Assignee

Lam Research

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

118358680

Patent Inventor Names

Stephen Topping0

Vincent Burkhart0

Date of Patent

December 5, 2023

Patent Application Number

173696940

Date Filed

July 7, 2021

Patent Citations

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US Patent 9850573 Non-line of sight deposition of erbium based plasma resistant ceramic coating

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US Patent 10079154 Atomic layer etching of silicon nitride

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US Patent 10147610 Substrate pedestal module including metallized ceramic tubes for RF and gas delivery

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US Patent 10403535 Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system

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US Patent 10431467 Module including metallized ceramic tubes for RF and gas delivery

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US Patent 10937684 Placement member and method of manufacturing the same

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US Patent 11289355 Electrostatic chuck for use in semiconductor processing

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US Patent 11469084 High temperature RF connection with integral thermal choke

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US Patent 6858265 Technique for improving chucking reproducibility

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US Patent 6879051 Systems and methods to determine seed layer thickness of trench sidewalls

Patent Primary Examiner

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