US Patent 11086233 Protective coating for electrostatic chucks
Patent 11086233 was granted and assigned to Lam Research on August, 2021 by the United States Patent and Trademark Office.
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Patent abstract
An ElectroStatic Chuck (ESC) including a chucking surface having at least a portion covered with a coating of silicon oxide (SiO2), silicon nitride (Si3N4) or a combination of both. The coating can be applied in situ a processing chamber of a substrate processing tool and periodically removed and re-applied in situ to create fresh coating.
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Patent Inventor Names
Stephen Topping0
Vincent Burkhart0
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Patent Number
110862330
Date of Patent
August 10, 2021
0Patent Application Number
201803200
Date Filed
March 20, 2018
0Official Website
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US Patent 11086233 Protective coating for electrostatic chucks
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11086233
Date of patent
August 10, 2021
Patent application number
20180320
Date Filed
March 20, 2018
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