US Patent 11103972 Buff processing device and substrate processing device
Patent 11103972 was granted and assigned to Ebara Corporation on August, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 11, 2016
0
Date of Patent
August 31, 2021
0
Patent Applicant
Patent Application Number
20161011
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Patent Inventor Names
Naoki Toyomura
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Junji Kunisawa
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Mitsuru Miyazaki
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Hideo Aizawa
0
Patent Jurisdiction
Patent Number
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