Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 11209729 Vacuum-integrated hardmask processes and apparatus

Patent 11209729 was granted and assigned to Lam Research on December, 2021 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Current Assignee
Lam Research
Lam Research
Date Filed
November 21, 2019
Date of Patent
December 28, 2021
Patent Applicant
Lam Research
Lam Research
Patent Application Number
16691508
Patent Citations Received
‌
US Patent 12125711 Reducing roughness of extreme ultraviolet lithography resists
0
‌
US Patent 12105422 Photoresist development with halide chemistries
0
‌
US Patent 11921427 Methods for making hard masks useful in next-generation lithography
0
‌
US Patent 11988965 Underlayer for photoresist adhesion and dose reduction
0
‌
US Patent 12062538 Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement
0
Patent Inventor Names
Bhadri N. Varadarajan
0
Adrien LaVoie
0
Artur Kolics
0
Dennis M. Hausmann
0
George Andrew Antonelli
0
Jeffrey Marks
0
Richard A. Gottscho
0
Sirish K. Reddy
0
Thomas Joseph Knisley
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11209729
Patent Primary Examiner
‌
Binu Thomas

Find more entities like US Patent 11209729 Vacuum-integrated hardmask processes and apparatus

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo