US Patent 11271117 Stacked high-blocking III-V power semiconductor diode

A stacked high-blocking III-V power semiconductor diode, with a p+ or n+ substrate layer, a p− layer, an n− region with a layer thickness of 10 μm-150 μm, and an n+ or p+ layer, wherein all layers comprise a GaAs compound, a first metallic contact layer and a second metallic contact layer and a hard mask layer with at least one seed opening, wherein the hard mask layer is integrally bonded to the substrate layer or integrally bonded to the p− layer, the n− region extends within the seed opening and over an edge region, adjacent to the seed opening, of a top side of the hard mask layer and the n− region within the seed opening is integrally bonded to the p− layer or to the n+ substrate layer and in the edge region of the top side of the hard mask layer to the hard mask layer.