Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 22, 2022
Patent Application Number
16729659
Date Filed
December 30, 2019
Patent Citations Received
Patent Primary Examiner
A resist composition comprising a base polymer and a quencher in the form of an ammonium salt compound having an iodized aromatic ring and a tertiary ester structure offers a high sensitivity and minimal LWR or improved CDU, independent of whether it is of positive or negative tone.
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