Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 4, 2022
Patent Application Number
16729643
Date Filed
December 30, 2019
Patent Citations
Patent Citations Received
Patent Primary Examiner
CPC Code
A resist composition comprising a base polymer and a quencher in the form of an amine compound having an iodized aromatic ring and a tertiary ester structure offers a high sensitivity and minimal LWR or improved CDU, independent of whether it is of positive or negative tone.
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