Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 19, 2022
Patent Application Number
17122004
Date Filed
December 15, 2020
Patent Citations Received
Patent Primary Examiner
A semiconductor structure, and a method of making the same includes a multiple electrode stacked capacitor containing a sequence of first metal layers interleaved with second metal layers. A quad-layer stack separates each of the first metal layers from each of the second metal layers, the quad-layer dielectric stack includes a first dielectric layer made of Al
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