Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 11314168 Underlayer for photoresist adhesion and dose reduction

Patent 11314168 was granted and assigned to Lam Research on April, 2022 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity

All edits

Edits on 24 Oct, 2024
"update inverses"
Golden AI profile picture
Golden AI
edited on 24 Oct, 2024
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 12125711 Reducing roughness of extreme ultraviolet lithography resists
0
Edits on 3 Oct, 2024
"update inverses"
Golden AI profile picture
Golden AI
edited on 3 Oct, 2024
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 12105422 Photoresist development with halide chemistries
0
Edits on 14 Aug, 2024
"update inverses"
Golden AI profile picture
Golden AI
edited on 14 Aug, 2024
Edits on 23 May, 2024
"update inverses"
Golden AI profile picture
Golden AI
edited on 23 May, 2024
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 11988965 Underlayer for photoresist adhesion and dose reduction
0
Edits on 12 Mar, 2024
"update inverses"
Golden AI profile picture
Golden AI
edited on 12 Mar, 2024
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 11921427 Methods for making hard masks useful in next-generation lithography
0
Edits on 26 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 26 Apr, 2023
Edits on 5 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 5 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 5 Apr, 2023
Edits on 4 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 4 Apr, 2023
Edits on 31 Mar, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 31 Mar, 2023
Edits on 28 Mar, 2023
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 28 Mar, 2023
Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
0
Current Assignee
Lam Research
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
113141680
Date of Patent
April 26, 2022
0
Patent Application Number
173106350
Date Filed
January 11, 2021
0
Patent Citations
‌
US Patent 10025179 Organometallic solution based high resolution patterning compositions
0
‌
US Patent 10228618 Organotin oxide hydroxide patterning compositions, precursors, and patterning
0
‌
US Patent 10416554 Organometallic solution based high resolution patterning compositions
0
‌
US Patent 10514598 Vacuum-integrated hardmask processes and apparatus
0
‌
US Patent 10580585 Two-step deposition process
0
‌
US Patent 10627719 Methods of reducing metal residue in edge bead region from metal-containing resists
0
‌
US Patent 10642153 Organometallic solution based high resolution patterning compositions and corresponding methods
0
‌
US Patent 10649328 Pre-patterned lithography templates, processes based on radiation patterning using the templates and processes to form the templates
0
‌
US Patent 10732505 Organotin oxide hydroxide patterning compositions, precursors, and patterning
0
‌
US Patent 10775696 Organotin oxide hydroxide patterning compositions, precursors, and patterning
0
‌
US Patent 10782610 Radiation based patterning methods
0
‌
US Patent 10787466 Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods
0
‌
US Patent 10831096 Vacuum-integrated hardmask processes and apparatus
0
Patent Primary Examiner
‌
Caleen O Sullivan
0
CPC Code
‌
H01L 21/0332
0
‌
H01L 21/0274
0
‌
H01L 21/02274
0
‌
G03F 7/70033
0
‌
G03F 7/094
0
Edits on 26 Mar, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 26 Mar, 2023
Edits on 23 Mar, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 23 Mar, 2023
Edits on 23 Mar, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 23 Mar, 2023
Edits on 28 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 28 Sep, 2022
Edits on 27 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 27 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 26 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 26 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 26 Sep, 2022
Edits on 26 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 26 Sep, 2022

Find more entities like US Patent 11314168 Underlayer for photoresist adhesion and dose reduction

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo