Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 28, 2022
Patent Application Number
17110215
Date Filed
December 2, 2020
Patent Citations
Patent Primary Examiner
Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.
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