US Patent 11373950 Advanced lithography and self-assembled devices
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Patent Number
113739500
Date of Patent
June 28, 2022
0Patent Application Number
171102150
Date Filed
December 2, 2020
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Patent Applicant
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Patent Jurisdiction
Patent Number
113739500
Date of Patent
June 28, 2022
0Patent Application Number
171102150
Date Filed
December 2, 2020
0Patent Citations
Patent Primary Examiner
CPC Code
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US Patent 11373950 Advanced lithography and self-assembled devices
Article
Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.
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Patent applicant
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Patent jurisdiction
Patent number
11373950
Date of patent
June 28, 2022
Patent application number
17110215
Date Filed
December 2, 2020
Patent citations
Patent primary examiner
CPC Code
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