US Patent 11408911 Optomechanical structure with corrugated edge

This disclosure is related to devices, systems, and techniques for inducing mechanical vibration in one or more mechanical structures. For example, a system includes a mechanical structure extending along a longitudinal axis. The mechanical structure includes a set of mechanical beams, where the set of mechanical beams are configured to guide a modulated optical signal, and where the set of mechanical beams includes a first mechanical beam and a second mechanical beam separated by a gap. The first mechanical beam includes at least one of a first corrugated inner edge parallel to the longitudinal axis and a first corrugated outer edge parallel to the longitudinal axis. The second mechanical beam includes at least one of a second corrugated inner edge parallel to the longitudinal axis and a second corrugated outer edge parallel to the longitudinal axis.