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US Patent 11408912 Feedthrough rejection for optomechanical devices
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Patent
Current Assignee
Honeywell
Date Filed
August 13, 2019
Date of Patent
August 9, 2022
Patent Applicant
Honeywell
Patent Application Number
16539974
Patent Citations
US Patent 10139564 Vertically integrated optoelectronics package for MEMS devices
US Patent 10031158 Optomechanical force sensors, cantilevers, and systems thereof
US Patent 10079467 Optomechanical laser for dynamic measurement
US Patent 10107936 Atomic interferometric accelerometer with enhanced vibrational stability
US Patent 10126321 Micro-opto-electromechanical systems (MOEMS) device
US Patent 10705112 Noise rejection for optomechanical devices
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11408912
Patent Primary Examiner
Xin Y Zhong
CPC Code
G01C 19/5607
G01P 15/093
G01H 9/00
G01H 13/00
G01P 15/097
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