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US Patent 11434568 Heated ceramic faceplate

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Edits on 28 Apr, 2023
"update citations for inverse infoboxes"
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Golden AI
edited on 28 Apr, 2023
Infobox
Patent Citations
‌
US Patent 10062585 Oxygen compatible plasma source
0
Edits on 26 Apr, 2023
"Entity importer update"
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Golden AI
edited on 26 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
114345680
Date of Patent
September 6, 2022
0
Patent Application Number
170403350
Date Filed
March 19, 2019
0
Patent Citations
‌
US Patent 10023959 Anti-transient showerhead
0
‌
US Patent 10062585 Oxygen compatible plasma source
0
‌
US Patent 10519545 Systems and methods for a plasma enhanced deposition of material on a semiconductor substrate
0
‌
US Patent 10550473 Shower head, vapor phase growth apparatus, and vapor phase growth method
0
‌
US Patent 10780447 Apparatus for controlling temperature uniformity of a showerhead
0
‌
US Patent 10872747 Controlling showerhead heating via resistive thermal measurements
0
‌
US Patent 11242600 High temperature face plate for deposition application
0
‌
US Patent 10954595 High power showerhead with recursive gas flow distribution
0
‌
US Patent 11043360 Gas distribution plate assembly for high power plasma etch processes
0
Patent Primary Examiner
‌
Rudy Zervigon
0
CPC Code
‌
H01J 37/32532
0
‌
H01J 37/3244
0
‌
H01J 37/32009
0
‌
H01J 2237/3321
0
‌
C23C 16/50
0
‌
C23C 16/509
0
‌
C23C 16/46
0
‌
C23C 16/4557
0
‌
C23C 16/45565
0
‌
H01L 21/6719
0
‌
H01L 21/67103
0
Edits on 26 Apr, 2023
"update citations for inverse infoboxes"
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Golden AI
edited on 26 Apr, 2023
Edits on 23 Apr, 2023
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Golden AI
edited on 23 Apr, 2023
Edits on 7 Apr, 2023
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edited on 7 Apr, 2023
Edits on 5 Apr, 2023
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edited on 5 Apr, 2023
Edits on 26 Mar, 2023
"update citations for inverse infoboxes"
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Golden AI
edited on 26 Mar, 2023
Edits on 23 Mar, 2023
"update citations for inverse infoboxes"
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edited on 23 Mar, 2023
Edits on 27 Sep, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 27 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
114345680
Date of Patent
September 6, 2022
0
Patent Application Number
170403350
Date Filed
March 19, 2019
0
Patent Citations
‌
US Patent 10023959 Anti-transient showerhead
0
‌
US Patent 10062585 Oxygen compatible plasma source
0
‌
US Patent 10519545 Systems and methods for a plasma enhanced deposition of material on a semiconductor substrate
0
‌
US Patent 10550473 Shower head, vapor phase growth apparatus, and vapor phase growth method
0
‌
US Patent 10780447 Apparatus for controlling temperature uniformity of a showerhead
0
‌
US Patent 10872747 Controlling showerhead heating via resistive thermal measurements
0
‌
US Patent 11242600 High temperature face plate for deposition application
0
‌
US Patent 10954595 High power showerhead with recursive gas flow distribution
0
‌
US Patent 11043360 Gas distribution plate assembly for high power plasma etch processes
0
Patent Primary Examiner
‌
Rudy Zervigon
0
CPC Code
‌
H01J 37/32532
0
‌
H01J 37/3244
0
‌
H01J 37/32009
0
‌
H01J 2237/3321
0
‌
C23C 16/50
0
‌
C23C 16/509
0
‌
C23C 16/46
0
‌
C23C 16/4557
0
‌
C23C 16/45565
0
‌
H01L 21/6719
0
‌
H01L 21/67103
0
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 27 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 26 Sep, 2022
Edits on 25 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 25 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 25 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 24 Sep, 2022
Edits on 7 Sep, 2022
"Created via: Entity Importer"
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created this topic on 7 Sep, 2022
Edits made to:
Infobox (+29 properties)
Article (+433 characters)
‌

 US Patent 11434568 Heated ceramic faceplate

Article

An apparatus for distributing a gas within a process chamber is disclosed. The apparatus has a body formed from a distribution portion surrounded by a coupling portion. A heater is disposed within the distribution portion to heat the body to an elevated temperature. A bridge extends between the coupling portion and the distribution portion. The bridge limits heat transfer between the distribution portion and the coupling portion.

Infobox
Is a
Patent
Patent
Patent Applicant
Applied Materials
Applied Materials
Current Assignee
Applied Materials
Applied Materials
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11434568
Date of Patent
September 6, 2022
Patent Application Number
17040335
Date Filed
March 19, 2019
Patent Citations
‌
US Patent 10023959 Anti-transient showerhead
‌
US Patent 10062585 Oxygen compatible plasma source
‌
US Patent 10519545 Systems and methods for a plasma enhanced deposition of material on a semiconductor substrate
‌
US Patent 10550473 Shower head, vapor phase growth apparatus, and vapor phase growth method
‌
US Patent 10780447 Apparatus for controlling temperature uniformity of a showerhead
‌
US Patent 10872747 Controlling showerhead heating via resistive thermal measurements
‌
US Patent 11242600 High temperature face plate for deposition application
‌
US Patent 10954595 High power showerhead with recursive gas flow distribution
‌
US Patent 11043360 Gas distribution plate assembly for high power plasma etch processes
Patent Primary Examiner
‌
Rudy Zervigon
CPC Code
‌
H01J 37/32532
‌
H01J 37/3244
‌
H01J 37/32009
‌
H01J 2237/3321
‌
C23C 16/50
‌
C23C 16/509
‌
C23C 16/46
‌
C23C 16/4557
‌
C23C 16/45565
‌
H01L 21/6719
‌
H01L 21/67103

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