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US Patent 11434568 Heated ceramic faceplate

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Current Assignee
Applied Materials
Applied Materials
Date Filed
March 19, 2019
Date of Patent
September 6, 2022
Patent Applicant
Applied Materials
Applied Materials
Patent Application Number
17040335
Patent Citations
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US Patent 10872747 Controlling showerhead heating via resistive thermal measurements
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US Patent 10954595 High power showerhead with recursive gas flow distribution
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US Patent 11242600 High temperature face plate for deposition application
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US Patent 11043360 Gas distribution plate assembly for high power plasma etch processes
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US Patent 10023959 Anti-transient showerhead
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US Patent 10062585 Oxygen compatible plasma source
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US Patent 10519545 Systems and methods for a plasma enhanced deposition of material on a semiconductor substrate
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US Patent 10550473 Shower head, vapor phase growth apparatus, and vapor phase growth method
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US Patent 10780447 Apparatus for controlling temperature uniformity of a showerhead
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11434568
Patent Primary Examiner
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Rudy Zervigon
CPC Code
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C23C 16/50
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C23C 16/46
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C23C 16/509
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H01J 37/3244
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C23C 16/4557
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H01J 37/32009
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H01J 37/32532
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H01L 21/67103
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H01L 21/6719
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H01J 2237/3321
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