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US Patent 11549981 Thermal solution for massively parallel testing

Overview Structured Data Issues Contributors Activity

Is a

Date Filed

September 20, 2021

Date of Patent

January 10, 2023

Patent Application Number

17479998

Patent Citations

US Patent 10163668 Thermal dynamic response sensing systems for heaters

US Patent 10354785 Passive thermal switch devices having thermal switch material that passively switches between a thermal insulating state and a thermal conducting state and vehicles having the same

US Patent 10656200 High volume system level testing of devices with pop structures

US Patent 10775408 System for testing devices inside of carriers

US Patent 10955466 Environment control apparatus

US Patent 10908207 Systems and methods for conforming device testers to integrated circuit device with pressure relief valve

US Patent 10983145 System for testing devices inside of carriers

US Patent 10056225 Adjusting substrate temperature to improve CD uniformity

US Patent 10126356 Systems and methods for conforming test tooling to integrated circuit device with whirlwind cold plate

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Primary Examiner

CPC Code

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