US Patent 11668730 High speed atomic force profilometry of large areas
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US Patent 11668730 High speed atomic force profilometry of large areas
Article
An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications.
Infobox
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Patent Jurisdiction
Patent Number
116687300
Date of Patent
June 6, 2023
0Patent Application Number
172238490
Date Filed
April 6, 2021
0Patent Citations
Patent Primary Examiner
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