US Patent 11675276 Metrology apparatus and photonic crystal fiber
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US Patent 11675276 Metrology apparatus and photonic crystal fiber
Article
A metrology apparatus for determining a parameter of interest of a structure formed by a lithographic process on a substrate, the metrology apparatus comprising: an illuminator for illuminating the structure; a lens for collecting at least a portion of radiation diffracted from the structure; and an image sensor for receiving and obtaining a recording of the collected diffracted radiation; wherein the illuminator comprises at least one optical fiber for illuminating the structure directly.
Infobox
Is a
Patent Jurisdiction
Patent Number
116752760
Date of Patent
June 13, 2023
0Patent Application Number
165401450
Date Filed
August 14, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
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