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US Patent 11693051 Thermal head for independent control of zones

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Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116930510
Date of Patent
July 4, 2023
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Patent Application Number
180488310
Date Filed
October 21, 2022
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Patent Citations
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US Patent 7436059 Thermoelectric cooling device arrays
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US Patent 8772682 Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber
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US Patent 8891235 Thermal interface for multi-chip packages
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US Patent 8896335 Thermal controller for electronic devices
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US Patent 8927907 Thermally zoned substrate holder assembly
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US Patent 9291667 Adaptive thermal control
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US Patent 9307578 System and method for monitoring temperatures of and controlling multiplexed heater array
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US Patent 9360502 Increasing current carrying capability through direct liquid cooling of test contacts
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...
Patent Citations Received
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US Patent 12061227 Integrated heater and temperature measurement
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Patent Primary Examiner
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Tung X Nguyen
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CPC Code
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G01R 31/2856
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G01R 31/2875
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G01R 31/2877
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Disclosed herein are thermal heads and corresponding test systems for independently controlling a one or more components while testing one or more devices under test. In some embodiments, a thermal head comprises a plurality of adapters, one or more heaters, and one or more thermal controllers for independently controlling temperatures of the components. The thermal controllers may control the temperatures of at least some of the components independently such that thermal control of one component does not affect the thermal control of the other component. In some embodiments, the thermal control is by way of one or more cold plates, and the thermal head comprises one or more cold plates. Embodiments of the disclosure further include independent control of one or more forces using one or more force mechanisms.

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