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US Patent 11693051 Thermal head for independent control of zones

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
0
Date Filed
October 21, 2022
0
Date of Patent
July 4, 2023
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Patent Application Number
18048831
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Patent Citations
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US Patent 7436059 Thermoelectric cooling device arrays
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US Patent 8772682 Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber
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US Patent 8891235 Thermal interface for multi-chip packages
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US Patent 8896335 Thermal controller for electronic devices
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US Patent 8927907 Thermally zoned substrate holder assembly
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US Patent 9291667 Adaptive thermal control
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US Patent 9307578 System and method for monitoring temperatures of and controlling multiplexed heater array
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US Patent 9360502 Increasing current carrying capability through direct liquid cooling of test contacts
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US Patent 9377486 Thermal interface material handling for thermal control of an electronic component under test
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US Patent 9494353 Temperature control equipment
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•••
Patent Citations Received
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US Patent 12061227 Integrated heater and temperature measurement
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11693051
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Patent Primary Examiner
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Tung X Nguyen
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CPC Code
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G01R 31/2856
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G01R 31/2875
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G01R 31/2877
0

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