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US Patent 11754922 Resist composition and method of forming resist pattern

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Is a

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Inventor Names

KhanhTin Nguyen

Masatoshi Arai

Date of Patent

September 12, 2023

Patent Application Number

17304622

Date Filed

June 23, 2021

Patent Citations

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US Patent 9104101 Resist composition, method of forming resist pattern and polymeric compound

US Patent 9164380 Resist composition and method of forming resist pattern

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Patent Primary Examiner

Amanda C. Walke

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