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US Patent 11372329 Resist composition and method of forming resist pattern

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Masahito Yahagi0

Yuki Fukumura0

Yoichi Hori0

Tatsuya Fujii0

Date of Patent

June 28, 2022

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Patent Application Number

166008110

Date Filed

October 14, 2019

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Patent Citations

US Patent 10968175 Resist composition and patterning process

US Patent 10908502 Resist composition, method of forming resist pattern, polymeric compound, and compound

US Patent 10401727 Resist composition and method of forming resist pattern

US Patent 10394122 Resist composition, method for forming resist pattern, compound, and acid generator

Patent Citations Received

US Patent 11656549 Resist composition and method of forming resist pattern

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US Patent 11693316 Resist composition and method of forming resist pattern

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US Patent 11754922 Resist composition and method of forming resist pattern

Patent Primary Examiner

Amanda C. Walke

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0

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