US Patent 11372329 Resist composition and method of forming resist pattern
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Masahito Yahagi0
Tatsuya Fujii0
Yoichi Hori0
Yuki Fukumura0
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Patent Jurisdiction
Patent Number
113723290
Date of Patent
June 28, 2022
0Patent Application Number
166008110
Date Filed
October 14, 2019
0Patent Citations
Patent Primary Examiner
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US Patent 11372329 Resist composition and method of forming resist pattern
Infobox
Is a
Patent jurisdiction
Patent number
11372329
Date of patent
June 28, 2022
Patent application number
16600811
Date Filed
October 14, 2019
Patent citations
Patent primary examiner
CPC Code
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