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US Patent 11756887 Backside floating metal for increased capacitance
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Patent
Date Filed
June 22, 2021
Date of Patent
September 12, 2023
Patent Application Number
17354428
Patent Citations
US Patent 9455214 Wafer frontside-backside through silicon via
US Patent 9502350 Interconnect scaling method including forming dielectric layer over subtractively etched first conductive layer and forming second conductive material on dielectric layer
US Patent 10256186 Interconnect structure having subtractive etch feature and damascene feature
US Patent 10685168 Capacitance extraction for floating metal in integrated circuit
US Patent 10636739 Integrated circuit chip with power delivery network on the backside of the chip
US Patent 10878162 Metal with buried power for increased IC device density
US Patent 8552563 Three-dimensional semiconductor architecture
US Patent 9331062 Integrated circuits with backside power delivery
Patent Inventor Names
Nicholas Anthony Lanzillo
Hosadurga Shobha
Huai Huang
Lawrence A. Clevenger
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11756887
Patent Primary Examiner
Tu-Tu V Ho
CPC Code
H01L 21/7684
H01L 23/5226
H01L 23/5283
H01L 23/5286
H01L 23/5223
H01L 23/53209
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